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Electronic Equipment > Engineering Semiconductors > low k material ...
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low k material for copper interconnect

by jason0class@[EMAIL PROTECTED] Jan 15, 2008 at 10:28 PM

Hi All

Could anyone share some input about the trend and current status of
low k dielectric material used by major fab? Is spin-on or CVD more
widely accepted? Black diamond, FSG, Silk or ?
Thank you!


best rgds
Jason
 




 1 Posts in Topic:
low k material for copper interconnect
jason0class@[EMAIL PROTEC  2008-01-15 22:28:03 

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tan12V112 Fri Nov 21 12:19:53 CST 2008.